Mr. Ji-Hyun Jang Profile

Ji-Hyun Jang

at KAIST

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Publications (2)

Proceedings Article | 14 May 2004 Paper

Water-developable resists based on glyceryl methacrylate for 193-nm lithography

Jin-Baek Kim, Ji-Hyun Jang, Jae-Hak Choi, Kwan-Ku Lee, Jong-Sung Ko

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.534533

KEYWORDS: Polymers, Lithography, Resistance, Silicon, Etching, Polymerization, Semiconducting wafers, Silicon films, Lamps, Printing

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Proceedings Article | 11 June 1999 Paper

Chemically amplified resists based on acrylate polymers containing ketal groups in the side chains

Jin-Baek Kim, Jong Jin Park, Ji Hyun Jang, Jae-Young Kim

Proceedings Volume 3678, (1999) https://doi.org/10.1117/12.350247

KEYWORDS: Polymers, Diffusion, Deep ultraviolet, Chemically amplified resists, Photoresist materials, Lithography, Catalysis, Polymerization, Photoresist developing, Molecules

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