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Dr. Ji Sang Yahng
at Korea Research Institute of Standards and Science
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Author
Publications (1)
Proceedings Article | 7 March 2007 Paper
Increasing femtosecond laser processing efficiency by hybridization with nanosecond laser
J. Yahng, B. Chon, C. Kim, S. Jeoung, H. Kim
Proceedings Volume 6462, 646205 (2007) https://doi.org/10.1117/12.706230
KEYWORDS: Femtosecond phenomena, Laser ablation, Laser processing, Silicon, Pulsed laser operation, Laser damage threshold, Ultrafast lasers, Semiconducting wafers, Semiconductor lasers, Atomic force microscopy
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