Dr. Jing Quan Lin Profile

Dr. Jing Quan Lin

at AIST

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 20 May 2004 Paper

EUV generation using water droplet target

Jing Quan Lin, Hidehiko Yashiro, Tatsuya Aota, Toshihisa Tomie

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.534708

KEYWORDS: Plasma, Extreme ultraviolet, YAG lasers, Extreme ultraviolet lithography, Pulsed laser operation, Signal detection, Diodes, Liquids, Semiconductor lasers, Laser stabilization

Read Abstract +

Proceedings Article | 20 May 2004 Paper

Particle-cluster tin target for a high-conversion efficiency LPP source for EUVL

Toshihisa Tomie, Tatsuya Aota, Jing Quan Lin, Yoshifumi Ueno, Hidehiko Yashiro, Noriaki Kandaka, Hiroki Moriwaki, Gohta Niimi, Isao Matsushima, Kentaro Nishigori

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.535395

KEYWORDS: Plasma, Particles, Tin, Extreme ultraviolet, Plasma generation, Extreme ultraviolet lithography, Pulsed laser operation, Solids, Mirrors, Ions

Read Abstract +

Proceedings Article | 16 June 2003 Paper

Use of tin as a plasma source material for high conversion efficiency

Toshihisa Tomie, Tatsuya Aota, Yoshifumi Ueno, Gohta Niimi, Hidehiko Yashiro, Jingqian Lin, Isao Matsushima, Kazumasa Komiyama, Dong-Hoon Lee, Kentaro Nishigori, Hiroshi Yokota

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.483751

KEYWORDS: Plasma, Tin, Extreme ultraviolet, Magnetism, Plasma generation, Solids, Particles, Extreme ultraviolet lithography, Xenon, Mirrors

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years