Jooil Jang
at AUROS Technology, Inc.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 129553W (2024) https://doi.org/10.1117/12.3025291
KEYWORDS: Reflection, Objectives, Polarization, Semiconducting wafers, Optical systems, Calibration, Film thickness, Modeling, Ellipsometry

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