Ju-Mi Bang
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 9 July 2015 Paper
Proceedings Volume 9658, 965808 (2015) https://doi.org/10.1117/12.2203239
KEYWORDS: Photomasks, Chromium, Etching, Transmittance, Semiconducting wafers, Nanoimprint lithography, Phase shifts, Image processing, Immersion lithography, Optical lithography

Proceedings Article | 14 November 2007 Paper
Ju-Mi Bang, Issei Masumoto, Min-Kyu Ji, Sung-Hoon Jang, Isao Aburatani, Ji-Hyun Choi, Sang-Gyun Woo, Han-Ku Cho
Proceedings Volume 6730, 67302F (2007) https://doi.org/10.1117/12.746349
KEYWORDS: SRAF, Photomasks, Critical dimension metrology, Manufacturing, Printing, Lithography, Inspection, Mask making, Control systems, Semiconductors

Proceedings Article | 5 November 2005 Paper
Proceedings Volume 5992, 599214 (2005) https://doi.org/10.1117/12.632427
KEYWORDS: Optical proximity correction, Computing systems, Photomasks, Distributed computing, Manufacturing, Resolution enhancement technologies, Databases, Data conversion, Data storage, Silver

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