Mr. Juikun Lee Profile

Juikun Lee

at Entegris, Inc.

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Author

Publications (2)

Proceedings Article | 15 January 2003 Paper

Chemical mechanical planarization of large-area wells for MEMS and MOEMS

Juikun Lee, Heinz Busta, Ronald Myers, Tina Dear, Mehmet Dokmeci, Jonathan Bernstein

Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.478290

KEYWORDS: Chemical mechanical planarization, Polishing, Etching, Semiconducting wafers, Photomasks, Microelectromechanical systems, Microopto electromechanical systems, Silicon, Standards development, Surface finishing

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Proceedings Article | 15 January 2003 Paper

Chemical mechanical planarization: an effective microfabrication and micromachining technology for MEMS

Juikun Lee, Ronald Myers, Tina Dear, Carl Gensler

Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.478291

KEYWORDS: Chemical mechanical planarization, Microelectromechanical systems, Semiconducting wafers, Metals, Copper, Microfabrication, Micromachining, Polymers, Dielectrics, Surface finishing

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