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Karolina Mothander
at Lund Univ
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Author
Publications (1)
Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Sequential infiltration synthesis and pattern transfer using 6 nm half-pitch carbohydrate-based fingerprint block copolymer
Proceedings Volume 11612, 116120W (2021) https://doi.org/10.1117/12.2583803
KEYWORDS: Silicon, Reactive ion etching, Plasma, Optical lithography, FT-IR spectroscopy, Etching, Scanning electron microscopy, Reflectometry, Reflectance spectroscopy, Polymers
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