In this work, a novel multi-layer approach of high band-gap birefringent columnar coatings was proposed and investigated. The growth of anisotropic columnar nano-structures with elliptical shape cross-section was initiated by self-shadowing effect, which was induced by placing the substrate at oblique angle during the deposition process. Amorphous silica was deposited in so-called serial bi-deposition manner to form anisotropic films with high thickness uniformity. The combination of birefringent nano-structured and isotropic layers allows to form zero-order wave-plates with desirable phase delay difference (as an example, λ/4). Low optical losses and high transparency (T~99%) are demonstrated while indicating the potential to withstand laser fluences of 40 J/cm2 and 15 J/cm2 in nanosecond regime at 355 nm and 266 nm wavelengths, respectively.
In present work, oblique angle deposition technique was employed to form nano-structured anisotropic layers evaporating amorphous materials. The combination of birefringent nano-structured and isotropic layers allows to form highly transparent (T ~ 99 %) wave-plates. Furthermore, such combination can be used to form two spectrally separated Bragg reflection zones for perpendicular polarizations. This feature allows to form polarizers for zero angle applications. Both elements can be manufactured using only one material by changing only its structural morphology what leads to superior LIDT value. In this work, the possibility to evaporate waveplates and polarizers for zero angle applications was shown.
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