Ms. Kimberly A. Ruben Profile

Kimberly A. Ruben

at Brewer Science Inc

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Publications (2)

Proceedings Article | 30 December 2003 Paper

Polymeric protective coatings for MEMS wet-etch processes

Kimberly Ruben, Tony Flaim, Chenghong Li

Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.523965

KEYWORDS: Etching, Silicon, Polymers, Manufacturing, Semiconducting wafers, Microelectromechanical systems, Bulk micromachining, Electronic circuits, Potassium, Resistance

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Proceedings Article | 15 January 2003 Paper

Polymer protective coating for wet deep silicon etching processes

Mary Spencer, Kim Ruben, Chenghong Li, Paul Williams, Tony Flaim

Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.472717

KEYWORDS: Coating, Silicon, Polymers, Etching, Semiconducting wafers, Electronic circuits, Microelectromechanical systems, Wet etching, Plasma etching, Oxygen

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