Dr. Kirsten Ruck Profile

Dr. Kirsten Ruck

Process Engineer at Tokyo Electron Europe Limited German Branch

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Publications (2)

Proceedings Article | 5 April 2007 Paper

Effect and procedures of post exposure bake temperature optimization on the CD uniformity in a mass production environment

Kirsten Ruck, Heiko Weichert, Steffen Hornig, Frank Finger, Göran Fleischer, Dave Hetzer

Proceedings Volume 6518, 651850 (2007) https://doi.org/10.1117/12.712145

KEYWORDS: Semiconducting wafers, Silicon, Calibration, Scatterometry, Metrology, Wafer testing, Scatter measurement, Critical dimension metrology, Optical lithography, Integration

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Proceedings Article | 23 March 2007 Paper

Initial process evaluation for next generation immersion technology node

Tadatoshi Tomita, Kathleen Nafus, Shinichi Hatakeyama, Hitoshi Kosugi, Masashi Enomoto, Shin Inoue, Kirsten Ruck, Heiko Weichert, Mireia Blanco Mantecon, Raf Stegen, Casper de Groot, Richard Moerman

Proceedings Volume 6519, 65192B (2007) https://doi.org/10.1117/12.712206

KEYWORDS: Semiconducting wafers, Bridges, Molecular bridges, Diffractive optical elements, Manufacturing, Metrology, Image processing, Particles, Optical lithography, Scanners

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