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Kshitij Sharma
at Univ of Houston
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Publications (1)
Proceedings Article | 9 April 2024 Presentation + Paper
Ionic liquid mediated directed self-assembly of diblock/triblock copolymer thin films for advanced lithography
K. Sharma, K. Shaik, C. Zhu, J. Strzalka, A. Karim
Proceedings Volume 12956, 129560E (2024) https://doi.org/10.1117/12.3010938
KEYWORDS: Block copolymers, Thin films, Polymethylmethacrylate, Copolymers, Lithography, Liquids, Mixtures, Film thickness, Annealing
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