Dr. Kyoko Watanabe
at Joining and Welding Research Institute Osaka Univ
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proceedings Volume 11612, 116120R (2021) https://doi.org/10.1117/12.2584067

Proceedings Article | 20 September 2020 Presentation
Proceedings Volume 11517, 115170G (2020) https://doi.org/10.1117/12.2574877
KEYWORDS: Polymers, Stochastic processes, Dispersion, Extreme ultraviolet, Line edge roughness, Molecules, Photons, Bridges, Chemical reactions, Diffusion

Proceedings Article | 31 May 2019 Paper
Proceedings Volume 10957, 109571R (2019) https://doi.org/10.1117/12.2514938
KEYWORDS: Polymers, Molecules, Quartz, Crystals, Polymer thin films, Extreme ultraviolet lithography, Diffusion, Complex systems, Chemically amplified resists, Lithography

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