Dr. Laurent Fillinger Profile

Dr. Laurent Fillinger

at TNO

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Publications (2)

Proceedings Article | 20 March 2020 Presentation + Paper

High resolution acoustic metrology by combining high GHZ frequency ultrasound and scanning probe microscopy

Maarten van Es, Benoit A. Quesson, Abbas Mohtashami, Daniele Piras, Kodai Hatakeyama, Laurent Fillinger, Paul L.M.J. van Neer

Proceedings Volume 11325, 113250C (2020) https://doi.org/10.1117/12.2552030

KEYWORDS: Acoustics, Ultrasonography, Scanning probe microscopy, Microscopy, Metrology, Image resolution, Transducers, Atomic force microscopy, Scanning electron microscopy

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Proceedings Article | 2 April 2019 Presentation + Paper

Quantitative tomography with subsurface scanning ultrasound resonance force microscopy

Maarten van Es, Laurent Fillinger, Hamed Sadeghian

Proceedings Volume 10959, 109590M (2019) https://doi.org/10.1117/12.2515048

KEYWORDS: Image processing, Ultrasonography, Microscopy, Scanning electron microscopy, Scanning probe microscopy, Tomography, Defect detection, Einsteinium, Metrology, Atomic force microscopy

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