With the increasing adoption of LIDAR technology in recent years, the beam scanning system, an integral component of LIDAR, has garnered significant attention. The beam scanning system represents a laser scanning technology capable of achieving rapid, highly precise, and stable performance. However, conventional mechanical beam scanning systems, which are widely used, suffer from large size and susceptibility to wear and tear. Similarly, solid-state beam scanning systems often encounter issues such as limited scanning angles and slow scanning speeds. To address the shortcomings of existing solutions, we propose a novel solid-state beam scanning system based on Metasurface-integrated VCSEL as the laser light source in this paper. By redirecting the outgoing laser light from the Metasurface-integrated VCSELs, we generate a largearea spatial point cloud in space, thereby facilitating beam scanning tasks. Additionally, we validate the efficacy of our proposed system through experimentation using an FPGA demo board to simulate the VCSEL driver chip. This experimental verification successfully demonstrates the real-time dynamic beam scanning capabilities of our proposed scheme.
Optical biosensors provide important opportunities and have broad application prospects in biomedicine, disease diagnosis, pharmaceutical, and other fields. In this paper, a reusable VCSEL (vertical cavity surface emitting laser) biosensor chip integrated with a multilayer nano grating structure is introduced. The selected laser wavelength is 850 nm, and the overall device adopts semiconductor laser packaging technology to achieve high integration of light source and multilayer nano grating. A small plasmonic biosensor platform based on hyperbolic metamaterial (HMMs) Au/Si3N4 is studied using the grating coupling principle. The transmission peak is adjusted to the wavelength of 850 nm by changing the nano grating parameters so as to improve the sensitivity of the sensor chip. However, the high cost of the sensor chip which is based on noble metal nanostructure and precision technology hinders its further application. In this paper, we propose to grow and remove parylene film on the sensor chip to realize the reuse of biosensors.
Beam steering devices are widely used in laser radar, optical communication, free space optical interconnection and other fields. But at present, most beam steering devices are large in size, complex in structure and low in reliability, and then integration, portability and low power consumption of beam steering devices are the urgent problems to be solved in modern photoelectric system. This paper introduces a two-dimensional beam steering chip that integrates the liquid crystal optical phased array on the in-phased coupled Vertical Cavity Surface Emitting Laser (VCSEL) array. The theoretical model of beam steering chip is used finite difference time domain method to set up and simulate. The beam steering chip can theoretically achieve two-dimensional beam steering, with a max deflection range of 4.96°.
Biosensors have broad application prospects in biomedicine, pharmacy, chemical industry and environmental monitoring. Therefore, the research and development of biosensors has become a new hotspot in the development of science and technology in the world. A vertical cavity surface emitting laser (VCSEL) biosensor chip integrated with gold nanostructures is introduced in this paper. The chip mainly uses the packaging technology of semiconductor laser to realize the high integration of light source, hexagonal gold nanoparticle array, and detection system. We use anodic aluminum oxide film (AAO) as a mask to prepare hexagonal gold nanoparticle array, combined with a microfluidic chip to realize the sensing application that can be sensitive to the change of environmental solution. We modify the gold nanoparticles on the chip surface with specific antibodies, and then inject different concentrations of protein solution for detection. The output light power changes with the change of environmental solution, so as to detect the concentration and type of biological solution. The sensor has the advantages of low cost, high sensitivity, and high integration.
Vertical cavity surface emitting laser (VCSEL) is an excellent laser light source with small volume, low threshold, easy integration, and array arrangement, and has been widely used in sensing, communication, medical instruments, processing, and other fields since its birth. However, the application of VCSELs in some fields is limited, such as laser processing, projection and display, and medical equipment, because the laser light is a Gaussian distribution with concentrated energy. TopHat beams have received extensive attention due to their uniform distribution of energy over the spot area. In this paper, we tightly combine the metasurface with the VCSEL by means of on-chip integration and realize a metasurface-integrated VCSEL (MS-VCSEL) that can directly output the TopHat beam. The standard deviation is used to calculate the test results, and the uniformity of the spot was 70.5%. This work has important implications for the design of chip-scale optical systems, making it possible for laser chips with TopHat beams as light sources to be applied in future products.
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