Due to the characteristics of high hardness, wear resistance, corrosion resistance, excellent thermal shock resistance, and low thermal expansion coefficient, Si3N4 ceramics are widely used in aerospace, national defense, electronic and electrical, mechanical, chemical, and other fields. In this paper, the grooving experiments of Si3N4 ceramics were carried out by using a novel dual-beam coupled nanosecond pulse laser, and the influence of laser power and scanning speed on the surface morphology and geometric size of grooves were studied. The results show that the laser power has a significant effect on the surface morphology and geometric size of grooves. With the increase of laser power, the laser power density augments, and the width and depth of grooves increase. The groove width and groove depth first increase and then decrease with the increase of scanning speed, and both the groove width and depth reach the maximum value at scanning speed of 800 mm/min.
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