Dr. Matthieu Ja Denoual Profile

Dr. Matthieu Ja Denoual

at ST Microelectronis

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Publications (2)

Proceedings Article | 1 July 2005 Paper

Amorphous Si deposition method thanks traditional PECVD insulator equipments for seed layers performing

O. De Sagazan, E. Prodhome, D. Gaudin, M. Denoual, P. Guil, O. Bonnaud

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608282

KEYWORDS: Silicon, Plasma enhanced chemical vapor deposition, Actuators, Low pressure chemical vapor deposition, Semiconducting wafers, Plasma, Microelectromechanical systems, Electrodes, Deposition processes, Oxides

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Proceedings Article | 18 April 2003 Paper

Single vegetal cell handling and fixing in a microfluidic device

Matthieu Denoual, Aoki Koh, Agnes Mita-Tixier, Hiroyuki Fujita

Proceedings Volume 5119, (2003) https://doi.org/10.1117/12.498487

KEYWORDS: Microfluidics, Liquids, Stars, Microscopes, Silicon, Biological research, Photoresist materials, Semiconducting wafers, Telecommunications, Prototyping

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