Dr. Matthieu Sérégé Profile

Dr. Matthieu Sérégé

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Publications (1)

Proceedings Article | 22 February 2021 Presentation + Paper

Top-coats for scalable nano-manufacturing with high-χ block copolymers in lithographic applications

Xavier Chevalier, Cindy Gomes Correia, Gwenaelle Pound-Lana, Philippe Bézard, Matthieu Sérégé, Camille Petit-Etienne, Guillaume Gay, Gilles Cunge, Benjamin Cabannes-Boué, Célia Nicolet, Christophe Navarro, Ian Cayrefourcq, Marcus Müller, Georges Hadziioannou, Ilias Iliopoulos, Guillaume Fleury, Marc Zelsmann

Proceedings Volume 11612, 116120O (2021) https://doi.org/10.1117/12.2583717

KEYWORDS: Lithography, Directed self assembly, Silicon, Etching, Semiconducting wafers, Photonic metamaterials, Photomasks, Metamaterials, Manufacturing, Line edge roughness

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