Dr. Maxim Pisarenco Profile

Dr. Maxim Pisarenco

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Publications (5)

SPIE Journal Paper | 28 April 2023 Open Access

Training procedure for scanning electron microscope 3D surface reconstruction using unsupervised domain adaptation with simulated data

Tim Houben, Thomas Huisman, Maxim Pisarenco, Fons van der Sommen, Peter de With

JM3, Vol. 22, Issue 03, 031208, (April 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.031208

KEYWORDS: Scanning electron microscopy, Education and training, Semiconducting wafers, Electron microscopes, 3D scanning, Data modeling, Critical dimension metrology, Scatterometry, 3D metrology, 3D modeling

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Proceedings Article | 27 April 2023 Poster + Presentation + Paper

Depth estimation from SEM images using deep learning and angular data diversity

Tim Houben, Maxim Pisarenco, Thomas Huisman, Hans Onvlee, Fons van der Sommen, Peter de With

Proceedings Volume 12496, 124961E (2023) https://doi.org/10.1117/12.2658094

KEYWORDS: Scanning electron microscopy, Line scan image sensors, Education and training, Simulations, Analytic models, Monte Carlo methods, Electron beams, Neural networks, Image analysis, Silicon

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Proceedings Article | 5 March 2022 Paper

Depth estimation from a single CD-SEM image using domain adaptation with multimodal data

Tim Houben, Thomas Huisman, Maxim Pisarenco, Fons van der Sommen, Peter de With

Proceedings Volume 12084, 120841I (2022) https://doi.org/10.1117/12.2622635

KEYWORDS: Data modeling, 3D modeling, Semiconducting wafers, Monte Carlo methods, Neural networks, Metrology, Semiconductors, Scanning electron microscopy, 3D metrology, Sensors

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Proceedings Article | 13 May 2013 Paper

Alternative discretization in the aperiodic Fourier modal method leading to reduction in computational costs

M. Pisarenco, I. Setija

Proceedings Volume 8789, 87890K (2013) https://doi.org/10.1117/12.2020851

KEYWORDS: Electroluminescent displays, Maxwell's equations, Mathematical modeling, Stars, Numerical analysis, Process modeling, Scattering, Glasses, Analytical research, Inspection

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Proceedings Article | 14 May 2010 Paper

An extended Fourier modal method for plane-wave scattering from finite structures

Maxim Pisarenco, Joseph Maubach, Irwan Setija, Robert Mattheij

Proceedings Volume 7717, 77171H (2010) https://doi.org/10.1117/12.854420

KEYWORDS: Scattering, Diffraction gratings, Waveguides, Ordinary differential equations, Diffraction, Binary data, Refractive index, Superposition, Finite-difference time-domain method, Transmittance

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