Dr. Michael Heuken
at AIXTRON SE
SPIE Involvement:
Conference Program Committee | Author
Area of Expertise:
compound semiconductor , MOCVD , devices
Websites:
Publications (34)

Proceedings Article | 16 March 2024 Presentation
Proceedings Volume PC12887, PC1288709 (2024) https://doi.org/10.1117/12.3014109
KEYWORDS: Metalorganic chemical vapor deposition, Gallium oxide, Sapphire, Film thickness, Electronic components, Silicon, Semiconducting wafers, Reflectivity, Reflection, Optoelectronic devices

Proceedings Article | 13 March 2024 Paper
J. Holzwarth, I. Miccoli, A. Boyd, T. Korst, M. Heuken
Proceedings Volume 12906, 1290607 (2024) https://doi.org/10.1117/12.3000724
KEYWORDS: Germanium, Gallium arsenide, Semiconducting wafers, Vertical cavity surface emitting lasers, Metalorganic chemical vapor deposition, Light emitting diodes, Particles, Epitaxy, Industry, Industrial applications

Proceedings Article | 21 March 2023 Presentation
Proceedings Volume PC12421, (2023) https://doi.org/10.1117/12.2649840
KEYWORDS: Luminescence, Spectroscopes, Scanning transmission electron microscopy, Gallium nitride, Excitons, Visualization, Transistors, Spatial resolution, Semiconductors, Scanning electron microscopy

Proceedings Article | 21 March 2023 Presentation
Proceedings Volume PC12421, (2023) https://doi.org/10.1117/12.2646670
KEYWORDS: Gallium nitride, Temperature metrology, Luminescence, Diffusion, Visualization, Spatial resolution, Scanning electron microscopy, Line scan image sensors, Excitons, Electron microscopes

Proceedings Article | 14 March 2023 Presentation
Michael Heuken, Jona Riedel, Andrei Vescan, Holger Kalisch
Proceedings Volume PC12441, PC124410I (2023) https://doi.org/10.1117/12.2648731
KEYWORDS: Chemical vapor deposition, Optoelectronics, Perovskite, X-ray optics, X-rays, X-ray detectors, Sensors, Quartz, Prototyping, Process control

Showing 5 of 34 publications
Conference Committee Involvement (24)
Light-Emitting Devices, Materials, and Applications XXIX
25 January 2025 | San Francisco, California, United States
Light-Emitting Devices, Materials, and Applications XXVIII
29 January 2024 | San Francisco, California, United States
Light-Emitting Devices, Materials, and Applications XXVII
30 January 2023 | San Francisco, California, United States
Light-Emitting Devices, Materials, and Applications XXVI
24 January 2022 | San Francisco, California, United States
Light-Emitting Devices, Materials, and Applications XXV
6 March 2021 | Online Only, California, United States
Showing 5 of 24 Conference Committees
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