Mr. Natã Franco Soares de Bem Profile

Natã Franco Soares de Bem

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Publications (1)

Proceedings Article | 18 June 2024 Poster + Paper

Technological challenges in the measurement of photonic products with white light interferometry

Israfil Ansari, Natã Franco Soares de Bem, S. M. P. Kalaiselvi

Proceedings Volume 12997, 129971K (2024) https://doi.org/10.1117/12.3022537

KEYWORDS: Optical interferometry, Semiconducting wafers, Polishing, Atomic force microscopy, Surface finishing, Sensors, Defect detection, Surface roughness, Photonic integrated circuits, Metrology

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