Dr. Nikolaos Kehagias
at Nanotypos
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 27 May 2022 Paper
Proceedings Volume 12144, 121440D (2022) https://doi.org/10.1117/12.2629824
KEYWORDS: Tissues, Microscopy, In vivo imaging, Confocal microscopy, Two photon polymerization, Tissue optics, Spatial light modulators, Multiphoton fluorescence microscopy

Proceedings Article | 24 March 2020 Presentation
Proceedings Volume 11325, 113250U (2020) https://doi.org/10.1117/12.2559411
KEYWORDS: Nanostructures, Feature extraction, Nanoimprint lithography, 3D metrology, Process control, Materials processing, Metrology, Error analysis, Scanning electron microscopy, Atomic force microscopy

Proceedings Article | 26 March 2019 Paper
Proceedings Volume 10958, 109581K (2019) https://doi.org/10.1117/12.2523931
KEYWORDS: Scanning electron microscopy, Image processing, Statistical analysis, Modeling, Image segmentation, Nanoimprint lithography, Metrology, Computational modeling, Image acquisition, Computer simulations, Defect inspection

Proceedings Article | 25 June 2014 Paper
C Simão, W. Khunsin, N. Kehagias, A. Francone, M. Zelsmann, M. Morris, C. Sotomayor Torres
Proceedings Volume 9083, 90832S (2014) https://doi.org/10.1117/12.2050181
KEYWORDS: Nanoimprint lithography, Nanostructures, Scanning electron microscopy, Silicon, Thin films, Annealing, Picosecond phenomena, Scattering, Silicon films, Directed self assembly

Proceedings Article | 20 March 2008 Paper
Proceedings Volume 6921, 69210F (2008) https://doi.org/10.1117/12.772545
KEYWORDS: Diffraction, Diffraction gratings, Polymers, Photoacoustic spectroscopy, Silicon, Nanoimprint lithography, Polymethylmethacrylate, Metrology, Aluminum, Semiconducting wafers

Showing 5 of 6 publications
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