For applications such as inertial confinement fusion and remote imaging detection, optical components need to meet the requirements of ultra smooth and low loss, and their manufacturing methods must meet the requirements of eliminating surface defects and subsurface damage. This paper mainly studies a polishing method for large-diameter optical components, which combines classical polishing with equal vacuum ionization polishing to balance polishing efficiency and removal of damaged layers. The idea of combined polishing can be extended to the comprehensive application of various polishing methods.
KEYWORDS: Signal detection, Complex systems, Error analysis, Control systems, Adaptive control, Oscillators, Interference (communication), Signal to noise ratio, Vibration control, Scientific research
In this paper, an adaptive frequency detection method based on frequency difference control is proposed. By controlling the frequency difference between the frequency of the signal to be checked and the frequency of the periodic policy, the adaptive selection between two kinds of chaotic vibrators is realized, thus the detection speed is accelerated, the detection accuracy is high, and the error is small. At the same time, the stability of adaptive frequency detection method based on frequency difference control is analyzed, and the simulation results show that the detection method has good stability.
In order to solve the problems of no uniform coating, edge coating, and severe coating defects in the process when processing 430mm×430mm optical components, The basic requirements of surface roughness data acquisition are analyzed and the application of inductive sensor in surface roughness is introduced. Optical element flattening layer coating and flow direction mechanisms, flattening layer material selection, and research on material characteristics and optical element planarization layer deposition process, achieving uniform coating of optical elements, reducing coating defects, and meeting the requirements of the next process polishing
PS plate (presensitized plate) is a new type of plate used in the fast printing industry. Due to the "squeaking" caused the production process, it will seriously affect the printing quality. This kind of helium detection device is currently entirely monopolized by large foreign companies, the price is expensive, and it is also not suitable for the conditions of domestic enterprises. The development of this device will fill the gap in the domestic field. At present, most domestic companies adopt manual inspection methods for naked eye observation. Because of the subjective nature of human beings, it is impossible to quantitatively analyze. The PS version quality report provided by the device development provides data basis for later-stage sheet and stacking work which can realize Intelligent production.
It is a critical technology to improve the optical film uniformity during the film deposition process. The ion beam sputtering and polishing system was used to prepare the film on the surface of large-aperture optical elements. A calculation method for controlling the dwell time ratio I of the ion beam working at the center and edge of optical component was proposed. The dwell time ratio I was calculated by the film thickness data obtained from the center and edge, and the dwell time ratio I was revised step by step. Then it was input in the program as one of the sputtering process parameters. The experimental results show that, when I was revised to -26.6%, uniform film can be achieved on optical elements with a diameter of 300mm-600mm. Taking a Si film on the surface of fused silica as an example, the experiment was carried out for 6 hours. The film thickness is about 212 nm, and the film uniformity could reach up to 0.42%, which meets film thickness uniformity requirements by ion beam sputtering deposition method.
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