Mr. Po-Hsien Yen Profile

Po-Hsien Yen

at National Taiwan Univ

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 14 September 2016 Paper

Infrared sensor by inkjet printing cytochrome c on suspending aluminum electrodes of post CMOS process

Shuo-Feng Liang, Po-Hsien Yen, Guo-Dung John Su

Proceedings Volume 9973, 997305 (2016) https://doi.org/10.1117/12.2236861

KEYWORDS: Proteins, Microbolometers, Infrared sensors, Resistance, Inkjet technology, Infrared radiation, Printing, Thin films, Sensors, Resistors

Read Abstract +

Cytochrome c protein thin film possesses a high temperature coefficient of resistance. In this paper, we systematically investigated the characteristics of cytochrome c, whose absorption coefficient is 65% at wavelengths of 8~12 μm. We found that the changes in resistance resulted from surface roughness. We also discovered that, while cytochrome c improves the temperature coefficient of resistance, a pure protein solution does not conduct well. It needs a buffer solution, acting as an electrolyte, to increase electrical conductance. However, the buffer solution decreases the temperature coefficient. Therefore, optimization of the ratio of cytochrome c protein to buffer solution is required. We determined the best mixing ratio of the protein solution for a sensing material. We then designed a chip for an infrared microbolometer with a MEMS structure of suspended aluminum electrodes. The protein solution was deposited on the sensing pixel using an inkjet printer. The temperature coefficient of resistance, thermal conductance, time constant and responsivity were 25.98%/K, 7.96 × 10-5 W/K, 1.094 ms and 2.57 × 105 V/W at 2 μA bias current, respectively. We experimentally demonstrated integrating cytochrome c protein with a CMOS circuit as a sensing pixel for a longwavelength infrared microbolometer. Based on our experimental results, such a microbolometer array holds promise for the future.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years