Prof. Paul A. Kohl Profile

Prof. Paul A. Kohl

at Georgia Institute of Technology

SPIE Involvement:

Author

Publications (8)

Proceedings Article | 9 April 2024 Presentation + Paper

Positive-tone, dry-develop poly(aldehyde) photoresist

Jose Lopez Ninantay, Anthony Engler, Jared Schwartz, Paul Kohl

Proceedings Volume 12957, 129570G (2024) https://doi.org/10.1117/12.3010169

KEYWORDS: Photoacid generators, Polymers, Photoresist materials, Lithography, Photoresist developing, Line edge roughness, Film thickness, Plasma, Ultraviolet radiation

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SPIE Journal Paper | 26 July 2016

High aspect ratio patterning of photosensitive polyimide with low thermal expansion coefficient and low dielectric constant

Andrew Dick, William Bell, Brendan Luke, Erin Maines, Brennen Mueller, Brandon Rawlings, Paul Kohl, C. Grant Willson

JM3, Vol. 15, Issue 03, 033503, (July 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.3.033503

KEYWORDS: Dielectrics, Optical lithography, Polymers, Semiconducting wafers, Ultraviolet radiation, Silicon, Solids, Thin films, Sodium, Near ultraviolet

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Proceedings Article | 20 March 2015 Paper

Directly patternable dielectric based on fluorinated polyimide

Andrew Dick, William Bell, Brendan Luke, Erin Maines, Brennan Mueller, Paul Kohl, Brandon Rawlings, C. Grant Willson

Proceedings Volume 9425, 94251D (2015) https://doi.org/10.1117/12.2085793

KEYWORDS: Dielectrics, Optical lithography, Polymers, Silicon, Semiconducting wafers, Near ultraviolet, Absorbance, Silicon films, Packaging, Ultraviolet radiation

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Proceedings Article | 9 February 2007 Paper

Flexible polymer pillars for optical chip assembly: materials, structures, and characterization

Muhannad Bakir, Paul Kohl, Alexei Glebov, Ed Elce, Dhananjay Bhusari, Michael Lee, James Meindl

Proceedings Volume 6478, 647802 (2007) https://doi.org/10.1117/12.699174

KEYWORDS: Polymers, Free space optics, Light sources, Polymer thin films, Optical fabrication, Waveguides, Polymer multimode waveguides, Sensors, Optical interconnects, Optical testing

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Proceedings Article | 16 January 2003 Paper

Electrostatic actuators and tunable micro capacitors/switches with expanded tuning range due to intrinsic stress gradients

Gary Gray, Matthew Morgan, Paul Kohl

Proceedings Volume 4981, (2003) https://doi.org/10.1117/12.478172

KEYWORDS: Gold, Electrodes, Actuators, Beam shaping, Instrument modeling, Microelectromechanical systems, Capacitors, Capacitance, Dielectrics, Distance measurement

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Proceedings Article | 15 January 2003 Paper

Fabrication of microchannels for compliant wafer-level packaging using sacrificial materials

Hollie Reed, Joseph Jayachandran, Robert Shick, Larry Rhodes, Jeffery Krotine, Ed Elce, Sue Ann Allen, Paul Kohl

Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.479568

KEYWORDS: Lead, Polymers, Packaging, Semiconducting wafers, Gold, Optical interconnects, Transistors, Copper, Waveguides, Wafer testing

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Proceedings Article | 29 June 1994 Paper

Submicron diffraction gratings etched on an InP/InGaAsP waveguide edge for wavelength division multiplexing

Elizabeth Twyford, Nan Marie Jokerst, Paul Kohl

Proceedings Volume 2240, (1994) https://doi.org/10.1117/12.179126

KEYWORDS: Diffraction gratings, Waveguides, Spectrometers, Etching, Semiconductors, Wavelength division multiplexing, Diffraction, Reactive ion etching, Interfaces, Dispersion

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Proceedings Article | 15 February 1994 Paper

Modeling the properties of PECVD silicon dioxide films using neural networks

Seung-Soo Han, Martin Ceiler, Sue Ann Bidstrup Allen, Paul Kohl, Gary May

Proceedings Volume 2091, (1994) https://doi.org/10.1117/12.167348

KEYWORDS: Plasma enhanced chemical vapor deposition, Neural networks, Process modeling, Etching, Silica, Silicon films, Wet etching, Plasma, Ions, Chemical vapor deposition

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Showing 5 of 8 publications

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