Dr. Peter D. Girouard
at imec
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 February 2018 Presentation + Paper
Proceedings Volume 10535, 1053508 (2018) https://doi.org/10.1117/12.2286862
KEYWORDS: Silicon, Waveguides, Silicon photonics, Semiconducting wafers, Etching, Deep ultraviolet, Photomasks, Optical fabrication, Lithography, Semiconductor lasers

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