Dr. Pietro Siciliano Profile

Dr. Pietro Siciliano

Head Delegate at Istituto per la Microelettronica e Microsistemi

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Author

Publications (16)

Proceedings Article | 21 May 2015 Paper

Tailoring design and fabrication of capacitive RF MEMS switches for K-band applications

Fabio Quaranta, Anna Persano, Giovanni Capoccia, Antonietta Taurino, Adriano Cola, Pietro Siciliano, Andrea Lucibello, Romolo Marcelli, Emanuela Proietti, Alvise Bagolini, Benno Margesin, Pierluigi Bellutti, Jacopo Iannacci

Proceedings Volume 9517, 95170S (2015) https://doi.org/10.1117/12.2179867

KEYWORDS: Switches, Bridges, Microelectromechanical systems, Actuators, Gold, Metals, K band, Silicon, Dielectrics, Lithography

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Proceedings Article | 13 March 2015 Paper

Surface modification, heterojunctions, and other structures: composing metal oxide nanocrystals for chemical sensors

Mauro Epifani, Elisabetta Comini, Raül Díaz, Aziz Genç, Jordi Arbiol, Teresa Andreu, Pietro Siciliano, Guido Faglia, Joan Morante

Proceedings Volume 9364, 936415 (2015) https://doi.org/10.1117/12.2078017

KEYWORDS: Oxides, Sensors, Nanocrystals, Metals, Heterojunctions, Catalysis, Chemical fiber sensors, Gases, Nanocomposites, Titanium dioxide

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Proceedings Article | 1 May 2014 Paper

Automatic digital filtering for the accuracy improving of a digital holographic measurement system

Marcella Matrecano, Lisa Miccio, Anna Persano, Fabio Quaranta, Pietro Siciliano, Pietro Ferraro

Proceedings Volume 9132, 91321H (2014) https://doi.org/10.1117/12.2052840

KEYWORDS: Holograms, Digital holography, Digital filtering, Spatial filters, Microelectromechanical systems, Optical filters, Holography, Imaging systems, 3D image reconstruction, Interferometry

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Proceedings Article | 24 May 2013 Paper

Wearable and flexible thermoelectric generator with enhanced package

L. Francioso, C. De Pascali, A. Taurino, P. Siciliano, A. De Risi

Proceedings Volume 8763, 876306 (2013) https://doi.org/10.1117/12.2017385

KEYWORDS: Thermoelectric materials, Thin films, Resistance, Prototyping, Finite element methods, Infrared cameras, Thin film deposition, Temperature metrology, Electronics, Skin

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Present work shows recent progresses in thin film-based flexible and wearable thermoelectric generator (TEG), finalized to support energy scavenging and local storage for low consumption electronics in Ambient Assisted Living (AAL) applications and buildings integration. The proposed TEG is able to recover energy from heat dispersed into the environment converting a thermal gradient to an effective electrical energy available to power ultra-low consumption devices. A low cost fabrication process based on planar thin-film technology was optimized to scale down the TEG dimensions to micrometer range. The prototype integrates 2778 thermocouples of sputtered Sb₂Te₃ and Bi₂Te₃ thin films (1 μm thick) on an area of 25 cm². The electrical properties of thermoelectric materials were investigated by Van der Pauw measurements. Transfer Length Method (TLM) analysis was performed on three different multi-layer contact schemes in order to select the best solution to use for the definition of the contact pads realized on each section of the thermoelectric array configuration to allow electrical testing of single production areas. Kapton polyimide film was used as flexible substrate in order to add comfortable lightweight and better wearability to the device. The realized TEG is able to autonomously recover the thermal gradient useful to thermoelectric generation thanks to an appropriate package designed and optimized by a thermal analysis based on finite element method (FEM). The proposed package solution consists in coupling the module realized onto Kapton foil to a PDMS layer opportunely molded to thermally insulate TEG cold junctions and enhance the thermal gradient useful for the energy scavenging. Simulations results were compared to experimental tests performed by a thermal infrared camera, in order to evaluate the real performance of the designed package. First tests conducted on the realized TEG indicate that the prototype is able to recover about 5°C between hot and cold thermocouples junctions with a thermal difference of 17°C initially available between body skin and environment, generating about 2 V of open circuit output voltage.

Proceedings Article | 5 May 2011 Paper

Polyimide/PDMS flexible thermoelectric generator for ambient assisted living applications

L. Francioso, C. De Pascali, I. Farella, C. Martucci, P. Cretì, P. Siciliano

Proceedings Volume 8066, 80662H (2011) https://doi.org/10.1117/12.887836

KEYWORDS: Thermoelectric materials, Prototyping, Thin films, Resistance, Device simulation, Electronics, Gold, Tellurium, Chemical elements, Bismuth

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Proceedings Article | 5 May 2011 Paper

Development of capacitive RF MEMS switches with TaN and Ta2O5 thin films

Anna Persano, Fabio Quaranta, Adriano Cola, Giorgio De Angelis, Romolo Marcelli, Pietro Siciliano

Proceedings Volume 8066, 80660V (2011) https://doi.org/10.1117/12.886715

KEYWORDS: Switches, Dielectrics, Microelectromechanical systems, Bridges, Thin films, Tantalum, Capacitance, Sputter deposition, Device simulation, Electrodes

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Proceedings Article | 15 January 2008 Paper

Nanoparticle thin films deposited by MAPLE for sensor applications

A. Caricato, S. Capone, M. Epifani, M. Lomascolo, A. Luches, M. Martino, F. Romano, R. Rella, P. Siciliano, J. Spadavecchia, A. Taurino, T. Tunno, D. Valerini

Proceedings Volume 6985, 69850H (2008) https://doi.org/10.1117/12.786981

KEYWORDS: Nanoparticles, Bioalcohols, Sensors, Thin films, Absorption, Scanning electron microscopy, Thin film deposition, Gas sensors, Silica, Titanium dioxide

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Proceedings Article | 15 May 2007 Paper

Nanofabrication of TiO₂ nanowires: I-V characteristic and improvement of metal oxides gas sensing properties

L. Francioso, A. Forleo, A. Taurino, P. Siciliano

Proceedings Volume 6589, 658913 (2007) https://doi.org/10.1117/12.722069

KEYWORDS: Metals, Oxides, Sensors, Gas sensors, Solids, Thin films, Silicon, Nanostructures, Silicon films, Nanowires

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Proceedings Article | 15 May 2007 Paper

Detection of unburned fuel as contaminant in engine oil by a gas microsensor array

Simonetta Capone, Marzia Zuppa, Dominique Presicce, Mauro Epifani, Luca Francioso, Pietro Siciliano, C. Distante

Proceedings Volume 6589, 658911 (2007) https://doi.org/10.1117/12.722007

KEYWORDS: Sensors, Contamination, Neurons, Principal component analysis, Statistical analysis, Gas sensors, Microsensors, Metals, Chemical analysis, Brain mapping

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Proceedings Article | 15 May 2007 Paper

Pulse voltammetry wine defects identification by means of miniaturized microelectrodes

L. Francioso, R. Bjorklund, P. Siciliano, T. Rulcker

Proceedings Volume 6589, 65891G (2007) https://doi.org/10.1117/12.722070

KEYWORDS: Silicon, Electrodes, Principal component analysis, Silicon films, Semiconducting wafers, Sensors, Platinum, Liquids, Photomasks, Bioalcohols

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Proceedings Article | 15 May 2007 Paper

Identification of wine defects by means of a miniaturized electronic tongue

G. Verrelli, L. Francioso, P. Siciliano, C. Di Natale, A. D'Amico, R. Paolesse, A. Logrieco

Proceedings Volume 6589, 65891I (2007) https://doi.org/10.1117/12.722019

KEYWORDS: Sensors, Statistical analysis, Silicon, Electrodes, Tongue, Platinum, Principal component analysis, Liquids, Analytical research, Chemical analysis

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Proceedings Article | 1 July 2005 Paper

Microhotplate-based silicon gas sensor arrays with linear temperature gradient for wine quality monitoring

Andrea Adami, Leandro Lorenzelli, Vittorio Guarnieri, Mario Zen, Luca Francioso, Pietro Siciliano, A. Forleo, A. Taurino, Giuseppe Agnusdei

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608246

KEYWORDS: Sensors, Gas sensors, Oxides, Silicon, Metals, Multilayers, Temperature metrology, Dielectrics, Thin films, Statistical analysis

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Proceedings Article | 1 July 2005 Paper

Cheap silicon technology integrated sol-gel combustion sensor

Luca Francioso, Dominique Sara Presicce, Mauro Epifani, Pietro Siciliano, Antonio Ficarella

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608565

KEYWORDS: Sensors, Silicon, Platinum, Silicon films, Thin films, Semiconducting wafers, Sol-gels, Combustion, Oxides, Oxygen

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Proceedings Article | 9 June 2004 Paper

Spin-coated thin films of different metal phthalocyanines and porphyrin-phthalocyanine blend for optochemical sensors of volatile organic compounds

Roberto Rella, Simona Capone, Pietro Siciliano, J. Spadavecchia, G. Ciccarella

Proceedings Volume 5502, (2004) https://doi.org/10.1117/12.566796

KEYWORDS: Absorption, Thin films, Sensors, Metals, Absorbance, Chemical analysis, Magnesium, Chemical elements, Sensing systems, Quartz

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Proceedings Article | 19 November 2001 Paper

Investigation of MoO3-WO3 thin film microstructure for gas sensing applications

Kosmas Galatsis, Muralihar Ghantasala, Yongxiang Li, Kourosh Kalantar-Zadeh, Adrian Trinchi, Wojtek Wlodarski, A. Taurino, Pietro Siciliano, Lara Cukrov

Proceedings Volume 4590, (2001) https://doi.org/10.1117/12.454610

KEYWORDS: Molybdenum, Oxides, Silicon, Carbon monoxide, Metals, Transmission electron microscopy, Crystals, Diffraction, Thin films, Gas sensors

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Proceedings Article | 10 March 1999 Paper

Integration of SnO2 sol-gel processes to gas sensor microfabrication: H2 and CO sensitivity evaluation

Corbel Cobianu, Raluca Iorgulescu, Cristian Savaniu, Antonela Dima, Dan Dascalu, Pietro Siciliano, Simona Capone, Roberto Rella, Fabio Quaranta, Lorenzo Vasanelli

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341188

KEYWORDS: Thin films, Sensors, Sol-gels, Silicon, Carbon monoxide, Metals, Gas sensors, Resistors, Resistance, Hydrogen

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Showing 5 of 16 publications

Conference Committee Involvement (7)

Smart Sensors, Actuators, and MEMS VIII

8 May 2017 | Barcelona, Spain

Smart Sensors, Actuators, and MEMS VII

4 May 2015 | Barcelona, Spain

Smart Sensors, Actuators, and MEMS VI

24 April 2013 | Grenoble, France

Smart Sensors, Actuators and MEMS

18 April 2011 | Prague, Czech Republic

Smart Sensors, Actuators and MEMS

4 May 2009 | Dresden, Germany

Showing 5 of 7 Conference Committees

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