Dr. Quentin Evrard Profile

Dr. Quentin Evrard

at University of Amterdam

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Publications (1)

Proceedings Article | 1 May 2023 Presentation + Paper

Influence of the anion in tin-based EUV photoresists properties

Quentin Evrard, Najmeh Sadegh, Chao Chun Hsu, Nicola Mahne, Angelo Giglia, Stefano Nannarone, Yasin Ekinci, Michaela Vockenhuber, Akira Nishimura, Tsuyoshi Goya, Takuo Sugioka, Albert Brouwer

Proceedings Volume 12498, 124980Z (2023) https://doi.org/10.1117/12.2658498

KEYWORDS: Extreme ultraviolet lithography, Photoresist materials, X-ray photoelectron spectroscopy, Extreme ultraviolet, Tin, Optical lithography, Materials properties, Lithography

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