Mr. Ralph Petersen Profile

Ralph Petersen

at Univ der Bundeswehr Hamburg

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Publications (3)

Proceedings Article | 4 November 2003 Paper

One way to accomplish the advanced requests of nanometrology: the nanometer coordinate measuring machine (NCMM)

Ralph Petersen, Hendrik Rothe

Proceedings Volume 5188, (2003) https://doi.org/10.1117/12.505684

KEYWORDS: Atomic force microscopy, Scanning probe microscopy, Actuators, Interferometers, Calibration, Head, Data acquisition, Sensors, Metrology, Mirrors

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Proceedings Article | 11 November 2002 Paper

Large AFM scans with a nanometer coordinate measuring machine (NCMM)

Ralph Petersen, Hendrik Rothe, Dorothee Huser

Proceedings Volume 4779, (2002) https://doi.org/10.1117/12.451749

KEYWORDS: Atomic force microscopy, Calibration, Scanning probe microscopy, Actuators, Standards development, Control systems, Prototyping, Interferometers, Head, Data storage

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Proceedings Article | 26 September 2000 Paper

Development problems of a nanometer coordinate measuring machine (NCMM)

Ralph Petersen, Hendrik Rothe

Proceedings Volume 4100, (2000) https://doi.org/10.1117/12.401663

KEYWORDS: Actuators, Control systems, Mathematical modeling, Scanning probe microscopy, Atomic force microscopy, Microsystems, Head, Optimization (mathematics), Nanotechnology, Optics manufacturing

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