Dr. Robert Kirchner Profile

Dr. Robert Kirchner

at TU Dresden

SPIE Involvement:

Author

Publications (10)

Proceedings Article | 17 March 2023 Presentation

Efficient in-situ material replacement in two-photon 3D laser writing

Robert Kirchner, Ye Yu, Man Ho Wong, Souha Toukabri, Jörg Knorr

Proceedings Volume PC12412, PC1241206 (2023) https://doi.org/10.1117/12.2654360

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Proceedings Article | 5 March 2021 Presentation

Large area multi-material-multi-photon 3D printing with fast in-situ material replacement

Yuan Gao, Souha Toukabri, Ye Yu, Andreas Richter, Robert Kirchner

Proceedings Volume 11677, 116770G (2021) https://doi.org/10.1117/12.2583487

KEYWORDS: 3D printing, Printing, Visualization, Two photon polymerization, Photonic nanostructures, Microfluidics, Laser applications, Fluid dynamics

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SPIE Journal Paper | 6 January 2018

Benchmarking surface selective vacuum ultraviolet and thermal postprocessing of thermoplastics for ultrasmooth 3-D-printed micro-optics

Robert Kirchner, Nachiappan Chidambaram, Helmut Schift

OE, Vol. 57, Issue 04, 041403, (January 2018) https://doi.org/10.1117/12.10.1117/1.OE.57.4.041403

KEYWORDS: Vacuum ultraviolet, Polymethylmethacrylate, Polymers, Surface roughness, Surface finishing, Micro optics, Lenses, Glasses, Two photon polymerization, Polymerization

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Proceedings Article | 2 January 2018 Paper

Surface smoothening of the inherent roughness of micro-lenses fabricated with 2-photon lithography

Helmut Schift, Robert Kirchner, Nachiappan Chidambaram, Mirco Altana

Proceedings Volume 10456, 104561Z (2018) https://doi.org/10.1117/12.2283236

KEYWORDS: Lenses, Polymers, Surface roughness, Lithography, Polymethylmethacrylate, Surface finishing, Two photon polymerization, Microlens array, Microlens, Electron beam lithography

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Proceedings Article | 28 September 2017 Paper

Depth-profiling of vertical material contrast after VUV exposure for contact-free polishing of 3D polymer micro-optics

R. Kirchner, R. Hoekstra, N. Chidambaram, H. Schift

Proceedings Volume 10446, 1044613 (2017) https://doi.org/10.1117/12.2279712

KEYWORDS: Micro optics, Polymers, Ultraviolet radiation, Surface finishing, Polymethylmethacrylate, Lithography, Microlens, 3D microstructuring

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Proceedings Article | 21 March 2017 Presentation + Paper

Selective surface smoothening of 3D micro-optical elements

Helmut Schift, Nachiappan Chidambaram, Mirco Altana, Robert Kirchner

Proceedings Volume 10144, 101440B (2017) https://doi.org/10.1117/12.2256358

KEYWORDS: Lenses, Optical testing, Polymethylmethacrylate, Lithography, Surface roughness, Vacuum ultraviolet, Polymers, Microlens, Ultraviolet radiation, Glasses, Prisms, Scanning electron microscopy, Surface finishing, Absorption

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Proceedings Article | 24 February 2017 Presentation + Paper

How post-processing by selective thermal reflow can reduce the roughness of 3D lithography in micro-optical lenses

Robert Kirchner, Nachiappan Chidambaram, Mirco Altana, Helmut Schift

Proceedings Volume 10095, 1009507 (2017) https://doi.org/10.1117/12.2258090

KEYWORDS: Lenses, Polymethylmethacrylate, Polymers, Microlens, Nanoimprint lithography, Lithography, Microlens array, Two photon polymerization, Glasses, Electron beam lithography, Surface roughness, Micro optics, Manufacturing, Surface finishing, Vacuum ultraviolet

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Proceedings Article | 21 March 2016 Paper

mr-PosEBR: a novel positive tone resist for high resolution electron beam lithography and 3D surface patterning

Stefan Pfirrmann, Robert Kirchner, Olga Lohse, Vitaliy Guzenko, Anja Voigt, Irina Harder, Anett Kolander, Helmut Schift, Gabi Grützner

Proceedings Volume 9779, 977925 (2016) https://doi.org/10.1117/12.2219165

KEYWORDS: Plasma, Dry etching, Electron beams, Polymers, Scanning electron microscopy, Reactive ion etching

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Proceedings Article | 30 November 2012 Paper

Planar optical microring resonators used as biosensors: guidelines for designing polymer compared to semiconductor-based waveguides

R. Landgraf, T. Haugwitz, R. Kirchner, W.-J. Fischer

Proceedings Volume 8561, 85610Q (2012) https://doi.org/10.1117/12.999970

KEYWORDS: Waveguides, Polymers, Microrings, Polymer multimode waveguides, Resonators, Silicon, Semiconductors, Scattering, Refractive index, Manufacturing

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Proceedings Article | 15 May 2010 Paper

Antisticking layers on antireflective chromium for hybrid (CNP) nanoimprint molds

R. Kirchner, B. Adolphi, R. Landgraf, W.-J. Fischer

Proceedings Volume 7545, 75450U (2010) https://doi.org/10.1117/12.865572

KEYWORDS: Chromium, Oxygen, Argon, Antireflective coatings, Fluorine, Silicon, Oxides, Plasma, Quartz, Nanoimprint lithography

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Showing 5 of 10 publications

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