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Robert J. MacDonald
at Univ of Washington
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Publications (1)
Proceedings Article | 4 November 2002 Paper
Electrostatically deformable microfrequency selective surface
Robert MacDonald, Karl Borhinger, Joel Rieter, Paul Gassman, Bill Dietze, John Sahr
Proceedings Volume 4809, (2002) https://doi.org/10.1117/12.453774
KEYWORDS: Dielectrics, Silicon, Switches, Aluminum, FSS based metamaterials, Switching, Oxides, Fabry–Perot interferometers, Microelectromechanical systems, Semiconducting wafers
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