Ms. Serafima Yu. Ryzhenkova Profile

Serafima Yu. Ryzhenkova

at M.V. Lomonosov Moscow State Univ.

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 15 March 2019 Paper

S. Dagesyan, S. Yu. Ryzhenkova, D. Presnov, I. Sapkov, V. Gaydamachenko, G. Zharik, A. Stepanov

Proceedings Volume 11022, 110221P (2019) https://doi.org/10.1117/12.2522487

KEYWORDS: Electrodes, Silicon, Chemical species, Gold, Etching, Logic devices, Ions, Crystals, Temperature metrology, Edge roughness

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