Mr. Sheng Siang Su Profile

Sheng Siang Su

at National Chiao Tung Univ

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Publications (2)

Proceedings Article | 3 October 2022 Poster

High-efficiency photolithographic NIR metalenses enabled by optical proximity correction with a neural-network lithographic model

Hsuehli Liu, Weiping Liao, Yuteng Chen, Shengsiang Su, Tongke Lin, Jiamin Shieh, Peichen Yu, Youchia Chang

Proceedings Volume PC12195, PC1219521 (2022) https://doi.org/10.1117/12.2644847

KEYWORDS: Optical proximity correction, Lithography, Optical lithography, Near infrared, Photoresist materials, Critical dimension metrology, Systems modeling, Semiconductors, Photoresist developing, Photomasks

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Proceedings Article | 3 October 2022 Poster

Near-infrared metalenses employing hyperuniform disordered arrangement of nanostructures

Sheng Siang Su, Ying Chu Wu, Hsueh Li Liu, Peichen Yu

Proceedings Volume PC12195, PC1219520 (2022) https://doi.org/10.1117/12.2644670

KEYWORDS: Nanostructures, Transmittance, Amorphous silicon, Silicon photonics, Silicon, Scattering, Polarizers, Photonics, Optical filters, Numerical simulations

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