Mr. Shenghua Song Profile

Shenghua Song

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Publications (2)

Proceedings Article | 26 May 2022 Presentation + Paper

Methodologies to handle large volumes of design and defect data for improved pre-silicon defect prediction

Parnashri Wankhede, Devansh Singh, Manish Kumar Sahu, Aruna Veluru, Monisa Ramesh Babu, Chenlong Miao, Shenghua Song, Shobhit Malik, Sriram Madhavan

Proceedings Volume 12052, 1205210 (2022) https://doi.org/10.1117/12.2614185

KEYWORDS: Machine learning, Data modeling, Defect detection, Data analysis, Design for manufacturability, Yield improvement

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Proceedings Article | 23 March 2020 Presentation + Paper

Foundry approach for layout risk assessment through comprehensive pattern harvesting and large-scale data analysis

Monisa Ramesh Babu, Shenghua Song, Qian Xie, Pouya Rezaeifakhr, Eric Chiu, Joo Hyun Park, Deborah Ryan, Kiruthika Murali, Praneetha Poluju, Shobhit Malik, Haizhou Yin, Sriram Madhavan, Panneerselvam Venkatachalam

Proceedings Volume 11328, 113280H (2020) https://doi.org/10.1117/12.2551939

KEYWORDS: Inspection, Silicon, Machine learning, Databases, Scanning electron microscopy, Data modeling, Manufacturing, Data analysis, Analytics, Semiconducting wafers

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