Mr. Shinsuke Maekawa Profile

Shinsuke Maekawa

at Institute of Science Tokyo

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Publications (2)

Proceedings Article | 30 April 2023 Presentation

Chemically tailored block copolymers based on polystyrene-b-polymethacrylates for DSA patterning

Teruaki Hayakawa, Shinsuke Maekawa, Yuta Nabae, Takehiro Seshimo, Takahiro Dazai, Kazufumi Sato

Proceedings Volume PC12497, PC124970G (2023) https://doi.org/10.1117/12.2662125

KEYWORDS: Optical lithography, Transmission electron microscopy, Thin films, Scanning electron microscopy, Lithography, Annealing, X-rays, X-ray microscopy, Scattering, Polymerization

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Proceedings Article | 13 June 2022 Presentation

Strongly-segregating chemically tailored polystyrene-b-polymethacrylates for sub-10 nm patterning

Teruaki Hayakawa, Shinsuke Maekawa, Yasunari Yoshimura, Lei Dong, Yuta Nabae, Takehiro Seshimo, Takahiro Dazai, Kazufumi Sato

Proceedings Volume PC12054, PC1205406 (2022) https://doi.org/10.1117/12.2618062

KEYWORDS: Optical lithography, Thin films, Scanning electron microscopy, Annealing, Transmission electron microscopy, Lithography, X-rays, X-ray microscopy, Scattering, Polymerization

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