Mr. Shinya Hori Profile

Shinya Hori

at Tokyo Electron Kyushu Ltd

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Publications (2)

Proceedings Article | 12 June 2003 Paper

Critical dimension (CD) control in 157-nm lithography

Shinya Hori, Kosuke Yoshihara, Hideharu Kyoda, Hidefumi Matsui, Takamitsu Furukawa, Seiro Miyoshi, Etsurou Kawaguchi, Toshiro Itani

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485057

KEYWORDS: Critical dimension metrology, Photoresist processing, Coating, Lithography, Line edge roughness, Fluorine, Control systems, Contamination, Polymers, Semiconducting wafers

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Proceedings Article | 16 July 2002 Paper

Defect analysis in 157-nm photolithography process

Yukio Kiba, Shinya Hori, Osamu Miyahara, Yuko Ono, Junichi Kitano, Seiro Miyoshi, Takamitsu Furukawa, Toshiro Itani

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473505

KEYWORDS: Optical lithography, Lithography, Satellites, Coating, Semiconductors, Chemically amplified resists, Semiconducting wafers, Polymers, Thin films, Metrology

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