A diagonal-based heterodyne grating interferometer (HGI) for two-dimensional displacement measurement is presented. It can simultaneously realize the high signal contrast and signal-to-noise ratio (SNR) with the specially designed cross grating. Meanwhile, an eightfold optical subdivision can be acquired with the proposed phase decoupling method. The signal contrast of 96.55% and SNR of 50 dB are obtained with laser power of 0.45 mW. Several tests including linear displacement, planar displacement, and stability are conducted in the experiments. The theoretical resolution of 0.125 nm, the short-range repeatability of 2.35 and 3.24 nm under round-trip movement of 10 μm, and the system stability better than ± 4 and ± 6 nm over 10 min are achieved for the X- and Y-directions, respectively. In addition, the measurement errors including geometric, nonlinear, and noncommon-path errors are analyzed. The results demonstrate that the proposed diagonal-based configuration combined with cross gratings is extremely suitable for HGIs, which has the potential to simultaneously improve the performance and practicability of HGIs.
We present a compact displacement measurement system based on single grating and 3×3 coupler, possessing the capability of large range and nanometer precision. With the introduction of 3×3 coupler for phase shift in interference signal, the present scheme has the advantages of simple structure, convenient alignment, and insensitivity to air turbulence, resulting in high robustness. We accordingly developed an efficient and precision signal processing method for phase demodulation on a digital signal processing, adapting to characteristics of outputs in 3×3 coupler, achieving a high-powered subdivision of the interference phase. It was validated that the phase precision was about 1° even when phase and amplitude errors were added to interference signals in the simulation, which corresponded to a displacement precision of about 3nm.
KEYWORDS: Power supplies, Signal detection, Electronics, Photodetectors, Linear filtering, Capacitors, Diffraction, Signal to noise ratio, Interference (communication), Precision measurement
A novel low-noise front-end electronics was proposed for detection of light signals with intensity about 10 μW and frequency above 2.7 MHz. The direct current (DC) power supply, pre-amplifier and main-amplifier were first designed, simulated and then realized. Small-size components were used to make the power supply small, and the pre-amplifier and main-amplifier were the least capacitors to avoid the phase shift of the signals. The performance of the developed front-end electronics was verified in cross-grating diffraction experiments. The results indicated that the output peak-topeak noise of the ±5 V DC power supply was about 2 mV, and the total output current was 1.25 A. The signal-to-noise ratio (SNR) of the output signal of the pre-amplifier was about 50 dB, and it increased to nearly 60 dB after the mainamplifier, which means this front-end electronics was especially suitable for using in the phase-sensitive and integrated precision measurement systems.
Based on the detailed derivation of the displacement measurement principle with Jones matrix method, the optical system of the heterodyne grating interferometry that we previously proposed was modified. A reflection phase grating with smaller grating pitch was designed with rigorous coupled-wave analysis (RCWA) to improve the measurement performance. The first order diffraction efficiency of 47.35% and 56.24% were obtained for TE and TM polarization, respectively. Therefore the TM polarization was chose to enhance the signal-to-noise ratio (SNR) of the beat signal. Meanwhile, the errors of the optical system resulting from grating non-uniformity, frequency mixing, polarization mixing and polarization-frequency mixing were discussed as well. It was shown that the frequency mixing was the main source of the errors, and the modified heterodyne grating interferometry had the potential to realize nanometer resolution for displacement measurement.
Traditional displacement measurement systems by grating, which purely make use of fringe intensity to implement fringe count and subdivision, have rigid demands for signal quality and measurement condition, so they are not easy to realize measurement with nanometer precision. Displacement measurement with the dual-wavelength and single-grating design takes advantage of the single grating diffraction theory and the heterodyne interference theory, solving quite well the contradiction between large range and high precision in grating displacement measurement. To obtain nanometer resolution and nanometer precision, high-power subdivision of interference fringes must be realized accurately. A dynamic tracking down-conversion signal processing method based on the reference signal is proposed. Accordingly, a digital phase measurement module to realize high-power subdivision on field programmable gate array (FPGA) was designed, as well as a dynamic tracking down-conversion module using phase-locked loop (PLL). Experiments validated that a carrier signal after down-conversion can constantly maintain close to 100 kHz, and the phase-measurement resolution and phase precision are more than 0.05 and 0.2 deg, respectively. The displacement resolution and the displacement precision, corresponding to the phase results, are 0.139 and 0.556 nm, respectively.
KEYWORDS: Phase measurement, Signal processing, Heterodyning, Diffraction gratings, Field programmable gate arrays, Demodulation, Digital signal processing, Diffraction, Interferometers, Interferometry
Displacement measurement by dual wavelength and single grating integrates the single grating diffraction theory and the
heterodyne interference theory. By taking advantage of the two theories, it solves the contradiction between large range
and high precision in grating displacement measurement quite well. In order to obtain nanometer resolution and
nanometer precision, high-power subdivision of interference fringe must be realized accurately. According to phase
demodulation theory for heterodyne interference signal, a digital phase measuring method is proposed by combining
frequency-mixing technique and pulse-filling method. The whole signal processing part, which is based on FPGA and
PLL, has been designed to realize the integer period measurement and high-powered subdivision of the decimal phase.
Through experiments, it is validated that the phase range is [-180°, 180°], and the phase measurement resolution and the
phase precision are above 0.03° and 0.1°, respectively. Moreover, the displacement measurement resolution and the
displacement precision, corresponding to the phase indexes, are 0.167nm and 0.556nm, respectively.
Dammann grating designed by using the scalar diffractive theory is a conventional uniform-intensity splitter with binaryphase,
whose diffraction efficiency is no more than 87% generally and representative value is about percent 80. This will
limit its further progress. Based on the rigorous couple-wave analysis theory and the genetic algorithm, a method has
been proposed to design a new uniform-intensity splitter with binary-phase subwavelength structure, which has higher
diffraction efficiency. Then five new-type beam splitters with binary-phase, whose splitting ratios are 3, 4, 5, 6 and 7, are
obtained by the emulating package. Their diffraction efficiency is more than 92%, and it is very bigger than the
conventional Dammann grating. Owing to its subwavelength structure, the size of this kind of splitter is smaller. It will
be widely applied in some domains, such as ultra-precision manufacturing, micro-opto-electro-mechanical system,
information processing, optical fiber communication, biomedicine, national defense, military affairs and entertainment,
etc.
The spin vision measurement system based on a two-CCD vision sensor is widely used in the wind tunnel experiments.
The math-model of vision measurement system is established, and the computing formula for the size of the effective
viewing field is derived by using the geometric imaging theory. The effective viewing field is studied in detail, which
considers the size of airplane model and the measuring accuracy of attitude parameters. And the relationships among
structural parameters of this system and parameters of CCD itself are analyzed. Finally, using the self-programming
emulating package, the simulation results are obtained, which have an important meaning on structure design of the spin
vision measurement system.
We presented the design of an achromatic quarter wave plates based on subwavelength grating structure and
considered the dispersion of material in design. The refractive indices of most material become small with the light
wavelength increasing, and the dispersion of effective refractive indices of TE and TM polarized waves in the
subwavelength structure increase with the light wavelength. Using this feature, we can design a quarter wave plates
whose phase retardation is maintained at π/2 for a larger wavelength range. A design method using the effective
medium theory is described, and the transmittance of TE and TM polarized waves are evaluated by numerical
calculation with the rigorous couple wave theory. The results showed that phase retardation of the quarter wave
plates had maintained retardation errors at ±1° for a ±9.85% change in wavelength, and the transmittance of
both TE and TM waves were more than 94%. We also designed an achromatic quarter wave plates applied to
visible light wavelength range using the method whose phase retardation maintained at ±2° in the 0.47 μm ~ 0.63 μm wavelength interval, and there also had a transmittance of more than 94% for the TE and TM waves.
A combined in vivo measurement system integrating laser- induced autofluorescence (LIAF) and diffuse reflectance spectroscopy (DRS) measurement was developed and investigated for detecting colonic adenoma. The system could work with regular endoscopy examination. A three- layer backpropagating neural network (BNN) was built to differentiate the two tissue classes. The preliminary results gave the mean predictive accuracy, sensitivity and specificity better than either of the two methods used alone.
Although there are lots of research papers on the intensity modulated fiber sensors, a very important problem is always neglected, which is the effect on the intensity modulation caused by perpendicularity between the axes of fiber pair and the reflector. Though several papers gave some literal description that the axes of fiber pair should be perpendicular to the reflector, few of them put forward a precise model and quantitative analysis. Just thinking about this, the mathematical model on this effect is established. The simulation curves with different obliquity of the reflector are computed and plotted. Results show that the obliquity of reflector has great influence on modulation function. So advice is presented that the axes of fiber pair should be perpendicular to the reflector.
Based on the math-model of coordinate measurement of the two-CCDs vision sensor, which is established in this paper, the relationships among the coordinate measuring precision, the effective viewing field, the structural parameters of this sensor and the parameters of CCD itself are analyzed. In the meantime, the optimal structure layout is performed by means of computer simulation. And the simulation results show that the optimal layout of the two-CCDs vision sensor is symmetric structure.
In order to obtain high measuring accuracy, a method of optimization-design is established. Then the computer simulation for the model is introduced. Finally, as results, the optimum structure parameters corresponding to two kinds of target-planes with different size are tabled. In addition, a group of 3D figures of the error distribution are given.
The reflective intensity-modulated fiber optic sensor for measuring displacement, the antenna-shaped fiber optic sensor, is usually composed of a fiber bundle with the emitting and receiving fibers in a specific arrangement at the probe tip. The three elementary types of fiber arrangement are: concentric distribution, semicircular distribution and random distribution. In comparison with the size of the fiber optic sensor, the thickness of clad and binding element of the fibers is so small that it can be ignored. The mathematical models of the modulation function for the single fiber couple which is composed of both an emitting fiber and a receiving one have once been presented. Analyzing the distribution of the fibers inside the fiber optic sensor by using the geometric and statistical theories, the general mathematical models of modulation function for the three types of the sensors mentioned above have been proposed. And all the models are simulated with computer and all the simulating results are briefly analyzed.
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