Dr. Stephan Fahr
Group Leader System Development at JENOPTIK Optical Systems GmbH
SPIE Involvement:
Conference Program Committee | Author
Area of Expertise:
Theoretical optics , Optical system engineering , Optical design , Micro-optics
Profile Summary

Stephan Fahr studied physics at the Friedrich-Schiller-University in Jena in Germany and reveived his Diploma in 2006 about low-loss diffraction gratings. Afterwards, he joined the group of Prof. Falk Lederer at the Institute of Condensed Matter Theory and Optics in Jena. In 2011 he received his PhD on light absorption in solar cells by utilizing micro- and nanostructures. In the years following his PhD, he has been working for the optical design group of JENOPTIK Optical Systems GmbH as an optical designer and system engineer for high numerical aperture inspection lenses and projection lenses for maskless lithography. In 2021 he became the team leader of the system development group dedicated to semiconductor inspection & display. Up to now, he has authored or co-authored more than 25 peer-reviewed papers, several book-chapters and holds several patents.
Publications (9)

Proceedings Article | 27 November 2017 Paper
Stephan Fahr, Jan Werschnik, Matthias Bening, Tim Baldsiefen
Proceedings Volume 10590, 1059006 (2017) https://doi.org/10.1117/12.2286587
KEYWORDS: Polarization, Inspection, Lenses, Optical inspection, Birefringence, Optical coatings, Optical design

Proceedings Article | 23 September 2015 Paper
Achmed Bouazzam, Torsten Erbe, Stephan Fahr, Jan Werschnik
Proceedings Volume 9626, 96261E (2015) https://doi.org/10.1117/12.2191511
KEYWORDS: Optical components, Tolerancing, Objectives, Deep ultraviolet, Inspection, Adhesives, Optical design, Optical mounts, Assembly tolerances, Polarization

Proceedings Article | 23 September 2015 Paper
Stephan Fahr, Jan Werschnik, Matthias Bening, Kristina Uhlendorf
Proceedings Volume 9626, 96260B (2015) https://doi.org/10.1117/12.2191268
KEYWORDS: Polarization, Inspection, Lenses, Geometrical optics, Wavefronts, Birefringence, Optical design, Error analysis, Optical coatings, Wafer-level optics

Proceedings Article | 18 May 2010 Paper
Proceedings Volume 7725, 77250O (2010) https://doi.org/10.1117/12.853980
KEYWORDS: Zinc oxide, Photonic crystals, Reflectors, Interfaces, Reflection, Thin film solar cells, Silicon, Solar cells, Absorption, Nanowires

Proceedings Article | 18 May 2010 Paper
Proceedings Volume 7725, 77250K (2010) https://doi.org/10.1117/12.857614
KEYWORDS: Zinc oxide, Photonic crystals, Silicon, External quantum efficiency, Tandem solar cells, Reflectors, Thin films, Atomic layer deposition, Crystals, Reflectivity

Showing 5 of 9 publications
Conference Committee Involvement (8)
Novel Optical Systems, Methods, and Applications XXVIII
3 August 2025 | San Diego, California, United States
Novel Optical Systems, Methods, and Applications XXVII
19 August 2024 | San Diego, California, United States
Novel Optical Systems, Methods, and Applications XXVI
22 August 2023 | San Diego, California, United States
Novel Optical Systems, Methods, and Applications XXV
22 August 2022 | San Diego, California, United States
Novel Optical Systems, Methods, and Applications XXIV
4 August 2021 | San Diego, California, United States
Showing 5 of 8 Conference Committees
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top