Dr. Stephan Weiss Profile

Dr. Stephan Weiss

at Precitec Optronik GmbH

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 4 October 2023 Presentation + Paper

Industrial solution for 12-in. wafer high speed quality inspection: FSS 310

M. Kogel-Hollacher, S. Weiss, S. Mieth, O. Schulz

Proceedings Volume 12684, 1268408 (2023) https://doi.org/10.1117/12.2675224

KEYWORDS: Semiconducting wafers, Sensors, Scanners, Inspection, Information technology, Distance measurement, Coating thickness, Semiconductors

Read Abstract +

The increasing demands in industry, for example for products in the consumer electronics sector or for assistance systems in cars, and the continuous development in semiconductor are leading to significant miniaturization in electronic components. These requirements are inevitably also transferred to ultra-precise manufacturing and thus ask for monitored production steps. In the context of Industry 4.0 and other developments in the context of modern production sensors to supervise production steps are crucial. An essential component here is non-destructive testing (NDT) and specifically optical metrology and overall end of line qualification. The FlyingSpotScanner (FSS) provides OCT measurements for thickness and topography based on a breakthrough, unique technology that enables high-speed, non-contact inspection for quality assurance across a wide range of materials and surfaces. The FSS310 Version has changed the semiconductor market. Thanks to its huge scan area of 310mm, a 12 inches diameter wafer can be fully checked for TTV, bow and warp in just 10 seconds. Due to the movable mirror system, long paths of linear axes are replaced by short rotary movements, resulting in an extreme reduction of the measuring time. The FLYING SPOT SENSOR FSS310 was awarded with the SPIE Prism Award in 2023.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years