Dr. Sudip Mukhopadhyay Profile

Dr. Sudip Mukhopadhyay

Lead Scientist at Honeywell Electronic Materials

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Publications (2)

Proceedings Article | 16 March 2009 Paper

Next generation siloxane-based Bottom Anti-Reflective Coating (BARC) formulations with selective strip rates and required optical properties

Sudip Mukhopadhyay, Joseph Kennedy, Yamini Pandey, Preeti Amin, Jaswinder Gill

Proceedings Volume 7274, 72742J (2009) https://doi.org/10.1117/12.814398

KEYWORDS: Optical lithography, Polymers, Resistance, Optical properties, Bottom antireflective coatings, Photoresist materials, Lithography, FT-IR spectroscopy, Chemistry, Dielectrics

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Proceedings Article | 4 April 2008 Paper

A high-Si content middle layer for ArF trilayer patterning

Joseph Kennedy, Songyuan Xie, Ronald Katsanes, Kyle Flanigan, Sudip Mukhopadhyay, Benjamin Wu, Edward Rutter, Mark Slezak

Proceedings Volume 6923, 69230W (2008) https://doi.org/10.1117/12.772854

KEYWORDS: Etching, Optical lithography, Plasma etching, Photoresist materials, Silicon, Plasma, Reflectivity, Chemistry, Photoresist processing, Wet etching

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