Dr. Taeho Lee Profile

Dr. Taeho Lee

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 12 November 2024 Presentation + Paper

Young Woo Kang, Ha Neul Kim, Taeho Lee, Young Wook Park, Jinho Ahn

Proceedings Volume 13215, 132150D (2024) https://doi.org/10.1117/12.3034680

KEYWORDS: Extreme ultraviolet, Pellicles, Multilayers, Transmittance, Emissivity, Reflectivity, Thermal stability

Proceedings Article | 12 November 2024 Poster + Paper

Yunsoo Kim, Dongmin Jeong, Seungho Lee, Myung-Jin Kim, Bom-Sok Kim, Taeho Lee, Jinho Ahn

Proceedings Volume 13215, 1321513 (2024) https://doi.org/10.1117/12.3034605

KEYWORDS: Ion implantation, Etching, Extreme ultraviolet, Photomasks, Alloys

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Keywords/Phrases