Small, tunable MEMS Fabry-Perot interferometer (FPIs) have recently been demonstrated to enable hyperspectral imaging in mobile devices, so far using Bragg reflector mirror technologies, which however limit the device tuning range. This paper presents the realization of a novel MEMS FPI structure based on Ag thin film mirrors (AgMFPI), which allows tuning the entire visible - very near infrared (VNIR) wavelength range (for example 450 - 900 nm) with one single component. The characterized transmission of the components is 12 - 45% with full-width-half-maximum values (FWHM) between 11 - 18 nm using 2 mm optical aperture, while using 3 mm optical aperture results in FWHM values of 12 - 20 nm. A very compact hyperspectral imager can thus be built to cover this spectra by combining this AgMFPI and a typical RGB type of image sensor.
This paper presents a novel miniaturized hand-held hyperspectral imager for VNIR range of λ = 600 – 900 nm based on MEMS Fabry-Perot interferometer (MFPI) technology. In recent years, tunable MFPI optical filters have been utilized to demonstrate sensors for mobile applications, including CO2 smartphone sensor for mid infra-red region and hyperspectral iPhone for visible spectrum. This hand-held sensor module targets the VNIR range in order to enable food sensing, while utilizing low-cost camera technology to enable potential volume scalability for future sensing applications. The sensor module is wirelessly connected to a mobile device, which enables further application algorithms development and cloudbased solutions.
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