Mr. Tanbir Hasan Profile

Tanbir Hasan

Principal Architect

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Author

Publications (7)

Proceedings Article | 28 March 2017 Paper

Advanced in-production hotspot prediction and monitoring with micro-topography

P. Fanton, T. Hasan, A. Lakcher, B. Le-Gratiet, C. Prentice, J.-G. Simiz, R. La Greca, L. Depre, S. Hunsche

Proceedings Volume 10145, 101450X (2017) https://doi.org/10.1117/12.2260024

KEYWORDS: Semiconducting wafers, Metrology, Optical lithography, Electron beam lithography, Scanners, Finite element methods, Scanning electron microscopy, Lithography, Inspection, Computational lithography

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Proceedings Article | 28 March 2017 Paper

Efficient hybrid metrology for focus, CD, and overlay

W. T. Tel, B. Segers, R. Anunciado, Y. Zhang, P. Wong, T. Hasan, C. Prentice

Proceedings Volume 10145, 101452E (2017) https://doi.org/10.1117/12.2257965

KEYWORDS: Metrology, Overlay metrology, Critical dimension metrology, Optical lithography, Scanners, Semiconductors, Semiconducting wafers, Etching, Sensors, Reticles

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Proceedings Article | 24 March 2016 Paper

An evaluation of edge roll off on 28nm FDSOI (fully depleted silicon on insulator) product

M. Gatefait, B. Le-Gratiet, C. Prentice, T. Hasan

Proceedings Volume 9778, 97782Y (2016) https://doi.org/10.1117/12.2218859

KEYWORDS: Scanners, Metrology, Image processing, Process control, Silicon, Sensors, Overlay metrology, Inspection, Forward error correction, Electroluminescence, Visualization, Diffraction, Field emission displays

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Proceedings Article | 22 March 2016 Paper

Holistic, model-based optimization of edge leveling as an enabler for lithographic focus control: application to a memory use case

T. Hasan, Y.-S. Kang, Y.-J. Kim, S.-J. Park, S.-Y. Jang, K.-Y. Hu, E. J. Koop, P. C. Hinnen, M. M. A. Voncken

Proceedings Volume 9778, 97783G (2016) https://doi.org/10.1117/12.2219121

KEYWORDS: Semiconducting wafers, Scanners, Servomechanisms, Sensors, Optimization (mathematics), Lithography, Yield improvement, Model-based design, Control systems, Process control

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Proceedings Article | 16 March 2016 Paper

Verification and application of multi-source focus quantification

J.-G. Simiz, T. Hasan, F. Staals, B. Le-Gratiet, W. Tel, C. Prentice, J.-W. Gemmink, A. Tishchenko, Y. Jourlin

Proceedings Volume 9781, 97810S (2016) https://doi.org/10.1117/12.2219143

KEYWORDS: Scanners, Design for manufacturability, Manufacturing, Product engineering, Reticles, Visualization, Image resolution, Chemical mechanical planarization, Sensors, Time metrology, Data modeling, Semiconducting wafers, Optical lithography, Performance modeling, Photomasks

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Proceedings Article | 4 September 2015 Paper

Product layout induced topography effects on intrafield levelling

J.-G. Simiz, T. Hasan, F. Staals, B. Le-Gratiet, W. Tel, C. Prentice, A. Tishchenko

Proceedings Volume 9661, 96610R (2015) https://doi.org/10.1117/12.2194079

KEYWORDS: Scanners, Semiconducting wafers, Polonium, Logic, Sensors, Printing, Photomasks, Electroluminescent displays, Product engineering, Optical lithography

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Proceedings Article | 19 March 2015 Paper

Predictability and impact of product layout induced topology on across-field focus control

J.-G. Simiz, T. Hasan, F. Staals, B. Le-Gratiet, P. Gilgenkrantz, A. Villaret, F. Pasqualini, W. Tel, C. Prentice, A. Tishchenko

Proceedings Volume 9424, 94241C (2015) https://doi.org/10.1117/12.2085283

KEYWORDS: Semiconducting wafers, Scanners, Sensors, Data modeling, Finite element methods, Silicon, Wafer-level optics, Convolution, Photomasks, Chemical mechanical planarization

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Showing 5 of 7 publications

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