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Tanguy Leveder
at LETI
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Author
Publications (4)
Proceedings Article | 3 May 2007 Paper
Investigation of capillary bridges growth in NIL process
Stefan Landis, Tanguy Leveder, Nicolas Chaix, Cecile Gourgon
Proceedings Volume 6533, 65330O (2007) https://doi.org/10.1117/12.736914
KEYWORDS: Bridges, Capillaries, Printing, Polymers, Nanoimprint lithography, Photoresist processing, Molecular bridges, Lithography, Etching, Semiconducting wafers
Proceedings Article | 5 April 2007 Paper
Real-time profile shape reconstruction using dynamic scatterometry
Proceedings Volume 6518, 65180W (2007) https://doi.org/10.1117/12.712015
KEYWORDS: Scatterometry, Metrology, Databases, Inverse problems, Data acquisition, Critical dimension metrology, Polarization, Visualization, Atomic force microscopy, Process control
Proceedings Article | 15 March 2007 Paper
Demolding strategy to improve the hot embossing throughput
Tanguy Leveder, Stefan Landis, Laurent Davoust, Sebastien Soulan, Nicolas Chaix
Proceedings Volume 6517, 65170N (2007) https://doi.org/10.1117/12.711151
KEYWORDS: Annealing, Temperature metrology, Nanoimprint lithography, Lithography, Heat treatments, Printing, Semiconducting wafers, Glasses, Polymers, Optical lithography
Proceedings Article | 24 March 2006 Paper
Nano-imprint of sub-100nm dots and lines feature on 8-inch wafer: influence of layout design
S. Landis, Tanguy Leveder, N. Chaix, C. Perret, Cécile Gourgon
Proceedings Volume 6151, 61512L (2006) https://doi.org/10.1117/12.659810
KEYWORDS: Polymers, Printing, Bridges, Scanning electron microscopy, Semiconducting wafers, Nanoimprint lithography, Critical dimension metrology, Silicon, Electron beam lithography, Polymer thin films
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