Dr. Toru Suzuki
at Gigaphoton Inc
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 16 March 2009 Paper
Proceedings Volume 7274, 72743L (2009) https://doi.org/10.1117/12.813642
KEYWORDS: Reliability, Oscillators, Light sources, Fluorine, Laser applications, Double patterning technology, Optical amplifiers, High power lasers, Excimer lasers, Immersion lithography

Proceedings Article | 16 March 2009 Paper
Proceedings Volume 7274, 72743J (2009) https://doi.org/10.1117/12.813476
KEYWORDS: Lithography, Light sources, Double patterning technology, Laser optics, Line edge roughness, Spatial coherence, Speckle, Temporal coherence, Immersion lithography, Critical dimension metrology

Proceedings Article | 11 April 2008 Paper
Masaya Yoshino, Hiroaki Nakarai, Takeshi Ohta, Hitoshi Nagano, Hiroshi Umeda, Yasufumi Kawasuji, Toru Abe, Ryoichi Nohdomi, Toru Suzuki, Satoshi Tanaka, Yukio Watanabe, Taku Yamazaki, Shinji Nagai, Osamu Wakabayashi, Takashi Matsunaga, Kouji Kakizaki, Junichi Fujimoto, Hakaru Mizoguchi
Proceedings Volume 6924, 69242S (2008) https://doi.org/10.1117/12.778430
KEYWORDS: Light sources, Double patterning technology, High power lasers, Laser stabilization, Power supplies, Laser applications, Oscillators, Error analysis, Excimer lasers, Laser development

Proceedings Article | 7 March 2008 Paper
Proceedings Volume 6924, 69242R (2008) https://doi.org/10.1117/12.778149
KEYWORDS: Semiconducting wafers, Reliability, Immersion lithography, Light sources, Laser stabilization, Metrology, High power lasers, Spectroscopy, Laser development, Laser applications

Proceedings Article | 26 March 2007 Paper
Proceedings Volume 6520, 652024 (2007) https://doi.org/10.1117/12.711366
KEYWORDS: Light sources, Spectroscopy, Immersion lithography, Optical proximity correction, Excimer lasers, Lithography, Scanners, Laser applications, Laser development, Critical dimension metrology

Showing 5 of 18 publications
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