Dimensional X-ray CT has attracted production industry due to its nature [1] enabling not only external dimensional measurement but also internal dimensional measurement which has been difficult for pre-existing dimensional measurement instruments. However, because the reconstruction process of three dimensional volume image may be affected by various kinds of error sources of the hardware and also the software, performance evaluation of dimensional X-ray CT has become one of the major issues [2], especially for X-ray CT system with higher energy such as several MeV. Resolution performance of high energy X-ray CT was evaluated by using a series of phantoms which equip regular line-and-space structures with various pitch sizes down to 100 micrometer. These phantoms were prototyped in the identical pitch sizes with three different materials. These phantoms were practically measured by a high energy X-ray CT. Results and perspective of the resolution performance is presented.
We described a multi-probe system comprising three laser interferometers and one autocollimator to measure a flat bar
mirror profile with nanometer accuracy. The simulation and pre-experiment of multi-probe system have been conducted
on an X-Y linear stage which is composed of a ball bearing slider and a stepping motor. The two standard deviation of
the flat bar mirror profile is mainly fitting the range of simulation results (±20 nm). Comparison of our measured data
with the results measured by ZYGO white light interferometer system showed agreement to within approximately ±30
nm, excluding some points at the edge of the mirror. From the pre-experiment results, we conclude that the systematic
error caused by accuracy of the moving stage can't be ignored. To eliminate this systematic error, the multi-probe system
has been implemented on a high-precision micro-coordinate measuring machine (M-CMM) that has been built at the
Advanced Industrial Science and Technology (AIST).
As the global R&D competition is intensified, more speedy measurement instruments are required both in laboratories and production process. In machinery areas, while contact type coordinate measuring machines (CMM) have been widely used, noncontact type CMMs are growing its market share which are capable of measuring enormous number of points at once. Nevertheless, since no industrial standard concerning an accuracy test of noncontact CMMs exists, each manufacturer writes the accuracy of their product according to their own rules, and this situation gives confusion to customers. The working group ISO/TC 213/WG 10 is trying to make a new ISO standard which stipulates an accuracy test of noncontact CMMs. The concept and the situation of discussion of this new standard will be explained. In National Metrology Institute of Japan (NMIJ), we are collecting measurement data which serves as a technical background of the standards together with a consortium formed by users and manufactures. This activity will also be presented.
Profiling of optical surfaces with discontinuous steps by monochromatic interferometry has the ambiguity of multiples of a quarter wavelength. Wavelength-tuning interferometry can measure these surfaces with a unit of synthetic wavelength that is usually much larger than that of the original source. In order to solve this problem, the fractional phases of the interferograms before and after wavelength tuning should be carefully estimated. Phase-shifting interferometry with a mechanical phase shift by a PZT transducer determines the fractional phases of the interferograms with a resolution of better than one part in 250 of the wavelength. After subtracting the mechanical drift of the test surface during wavelength tuning, the absolute distance between the test surface and the reference surface is measured with an uncertainty better than a quarter wavelength. An optical flat with two gauge blocks 1 mm in height contacting the surface is measured by a Fizeau interferometer. Experimental results demonstrate that the surface profile can finally be measured with an accuracy of 20 nm.
Assessment of measurement performance of gear measuring instrument is not easy task since a traceable master piece with sufficient accuracy has not been available. We propose a new artifact named Double Ball Artifact (DBA) which consists of a base plate and two balls. It has advantages of inexpensive, accurate, and calibrated with traceability. The examples of measurements by gear checkers and CMM will be presented to confirm the usefulness and validity of the artifact.
A phase-shifting interferometer (PSI) with equal phase steps, using a frequency-tunable diode laser and a Fabry-Perot cavity, is proposed for the Carre algorithm. The measurement accuracy of the Carre algorithm depends on the equality of the phase steps. Using the Fabry-Perot cavity as a highly stable optical frequency reference, a high degree of phase step equality can be realized in the PSI with an optical frequency shift. Our experimental scheme realizes an optical frequency step equality higher than 2.1×10-5 and a measurement repeatability of λ/850.
Ball plates have been increasingly used for checking the performance of coordinate measuring machines (CMMs) in Japan. In future, the ball plate will become a popular gauge for checking or calibrating the CMM in Japan. Currently, only the National Metrology Institute of Japan (NMIJ) can calibrate the ball plate in Japan. There are no other institutes or calibration laboratories able to calibrate the ball plate. Therefore, we organized a ball plate round-robin measurement to create the opportunity to relay our calibration technique to other institutes. This is the first domestic comparison of a ball plate calibration in Japan. Sixteen institutes including NMIJ participated in the comparison. In this round-robin measurement, we formed two groups and supplied two ball plates (KOBA 420×420 mm, RETTER 420×420 mm) and two material standards of length made by NMIJ for this round-robin measurement. The round-robin measurement took place from October 2003 to September 2004. We describe the results of the comparison in this paper.
To calibrate a squareness standard and a height micrometer, the Korea Research Institute of Standards and Science (KRISS) has built a new linear measuring machine moving vertically. The main requirement on design of the machine is to achieve the flexibility to calibrate several kinds of standards such as square master, cylindrical square, height micrometer and linear height gauge which are positioned vertically on the surface plate. The system consists of a precision granite column with an air bearing state, a laser interferometer and two electronic probes. In order to calibrate the squareness standards, the granite beam is used as a reference of squareness and a guide of vertical movement. The instrument incorporates a frequency stabilized He-Ne laser. The vertical movement is measured by a laser interferometer whose operation is based on the heterodyne measurement technique. Positioning for calibrating the height micrometer is undertaken by using a vertical state and a horizontal stage, and its measurement range of 0-700 mm. The paper gives a description of the system and a preliminary measurement results.
Non-destructive profiling of the front and rear surfaces of a transparent media by optical interferometry is described. Interferometric measurement of a transparent parallel media leads to problems of multiple-beam interference noise between the two surfaces. A wavelength scanning interferometer with new sampling functions can determine both surface shapes simultaneously suppressing internal reflection noises less than order of R2(lambda) where R is the reflection index of the media and (lambda) is the source wavelength.
A laser tracking interferometer system (LTS), which can measure 3D coordinates, has been developed in our laboratory. The LTS makes use of the principle of laser trilateration. The principle satisfies Abbe's principles and the coordinates are calculated solely form length measurements. Consequently, measurements directly traceable to length standard can be achieved. The first generation trackers, however, were large, heavy and not so accurate. So, we developed a compact, accurate laser tracker. It has a hemisphere mirror, which is used as a tracking mirror and is driven by an X-Y moving table. The performance of this laser tracker was checked by a high precision coordinate measuring machine. The results of the experiments show that the displacement measuring error of this laser tracker is below 0.6 micrometers , which is much better than any other conventional laser trackers.
Japanese Ultimate Flatness Interferometer (FUJI) is a Fizeau type flatness interferometer that is capable of measuring flatness over 310 mm diameter. The concept and technologies applied to FUJI are explained. To demonstrate the performance of FUJI, an international comparison was held with Australia, and the difference of two independent measurements were smaller than four nanometers.
To measure three dimensional coordinate we have been developing a laser tracking interferometer system (LTS). Four laser interferometers chase the movement of a target cat's eye and measure the change in distance between them. The position of the cat's eye is determined from the measured distances based on the principle of trilateration. Taking advantage of measurement redundancy produced by the fourth tracker, the position of the trackers and the initial position of the cat's eye can be estimated by a self-calibration algorithm. A restriction on the arrangement of the laser trackers to perform the self-calibration algorithm is theoretically studied. Finally a preliminary experiment was made to show the measurement error of about 40 micrometers for a 1 m measurement.
To measure a number of components of displacement with electronic speckle pattern interferometry (ESPI), multiple interferograms are usually captured in succession for different sensitivity vectors. Simultaneous measurement of a number of orthogonal components of displacement using ESPI can be carried out by application of the Fourier transform method. An object is illuminated by several object beams, and the scattered light is combined with one reference beam to form a first speckle image. After providing different tilts to the object beams, a second speckle image is recorded. A third speckle image is then recorded with the object loaded. The difference of the first and second images contains a set of straight carrier fringes. The difference of the first and third images contains a corresponding separate set of modulated carrier fringes due to the loading. The Fourier transforms of these two difference images show multiple peaks which correspond to the carrier fringes of the different object beams. By appropriately masking the corresponding peaks in the two Fourier transforms, the different sets of carrier fringes for the loaded and unloaded object configurations, can be separated. The phase corresponding to the different orthogonal components of displacement can then be retrieved from the ratios of the real to imaginary parts of the two inverse Fourier transforms of each filtered peak. An example of the measurement is presented.
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