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Wei-Yun Lee
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Publications (1)
Proceedings Article | 10 April 2024 Poster + Paper
AI-powered deconvolution-based super-resolution imaging for semiconductor OCD metrology and precise stage positioning
Yu-Ting Cheng, Wei-Yun Lee, Ming-Jie Liu, Wei-Hsin Chein, Liang-Chia Chen
Proceedings Volume 12955, 129553D (2024) https://doi.org/10.1117/12.3010986
KEYWORDS: Point spread functions, Image processing, Image deconvolution, Deconvolution, Systems modeling, Resolution enhancement technologies, Super resolution, Scanning electron microscopy, Image enhancement, Semiconductors
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