For the advanced light source including Free Electron Laser (FEL) and Synchrotron Radiation Facility, X-ray mirrors are very important component for X-ray transport in beamlines. The surface quality requirement on the mirrors for the Free Electron Laser (FEL) or for diffraction-limit application has been studied by many researchers. In this paper, the mirror quality specification in non-diffraction limited case is studied for the partial coherence light source. Simplified model for the beamline system is given and compared with other numerical simulation software. Then, the surface quality on the system performance is studied with special concern on focusing beam without structured or non-uniform pattern. Considering the characteristics of the real mirror error, the general requirement on the mirror surface quality is given for HEPS beamline design.
In order to give a complete evaluation of the beamline’s performance, x-ray mirrors should be measured by advanced surface metrology technique. How to improve spatial resolution of the surface profilers with long trace is one of the important issues for metrology lab. In this paper, we present our newly developed surface slope profiler with focused beam to sample the surface under test. This system has capability to measure precision optics with both high accuracy and spatial resolution. The systematic error of the instrument is also improved for large aperture footprint in the focusing lens considering the lateral beam shift effect. The characterization experiments of the optical head and the scanning measurement of the sample have been carried out to verify the performance of the profiler with accuracy of sub-100 nrad.
The quality of X-ray optics on beamline is a key factor that limits the performance of the beam line to play. For X-ray mirror surface characterization with high accuracy, long trace profiler and NOM for flat or slight curved mirror have been developed. However, these two kind of instruments cannot measure the highly curved mirror since requirement of high precision and that of large range contradict each other. In this paper, we proposed a novel wavefront-coding-based surface slope metrology technique. Four-dimension information of the optics under test, including x-y position and sagittal/tangential angle, is provided. Due to the focused beam used and the high speed DMD (Digital Mirror Device), high spatial resolution of the measurement is obtained. In experiment, we demonstrated this technique by measuring bend-based high energy monochromator developed in BSRF.
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