Dr. Wen-Tse Hsiao Profile

Dr. Wen-Tse Hsiao

at Taiwan Instrument Research Institute

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Author

Publications (3)

SPIE Journal Paper | 22 July 2014

Dual-photoresist complementary lithography technique for the formation of submicron patterns on sapphire substrates

Chun-Ming Chang, Shih-Feng Tseng, Chao-Te Lee, Wen-Tse Hsiao, J. Andrew Yeh, Donyau Chiang

JM3, Vol. 13, Issue 03, 033004, (July 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.3.033004

KEYWORDS: Photoresist materials, Oxides, Sapphire, Lithography, Plasma, Etching, Crystals, Laser development, Oxygen, Chlorine

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Proceedings Article | 31 March 2014 Paper

Dual photoresist complimentary lithography technique produces sub-micro patterns on sapphire substrates

Chun-Ming Chang, Shih-Feng Tseng, Chao-Te Lee, Wen-Tse Hsiao, Jer-Liang Yeh, Donyau Chiang

Proceedings Volume 9052, 90521R (2014) https://doi.org/10.1117/12.2044900

KEYWORDS: Photoresist materials, Oxides, Sapphire, Etching, Plasma, Oxygen, Crystals, Lithography, Laser development, Chlorine

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Proceedings Article | 22 June 2013 Paper

Effects of macro- and micro-hole milling parameters on Al2O3 ceramics using an ultraviolet laser system

W. T. Hsiao, S. F. Tseng, C. K. Chung, K. C. Huang, M. F. Chen

Proceedings Volume 8769, 87693L (2013) https://doi.org/10.1117/12.2018981

KEYWORDS: Ceramics, Laser drilling, Laser systems engineering, Laser processing, Ultraviolet radiation, Silicon, Semiconductor lasers, Integrated circuits, Diamond machining, Semiconducting wafers

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