Dr. William P. Rodrigues Profile

Dr. William P. Rodrigues

at Applied Materials Inc

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Publications (2)

Proceedings Article | 5 September 2001 Paper

Photoresist processing for high-resolution DUV lithography at 257 nm

Scott Fuller, Warren Montgomery, Jeff Albelo, William Rodrigues, Alex Buxbaum

Proceedings Volume 4409, (2001) https://doi.org/10.1117/12.438370

KEYWORDS: Photomasks, Photoresist processing, Critical dimension metrology, Lithography, Photoresist materials, Deep ultraviolet, Diffusion, Manufacturing, Coating, Process control

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Proceedings Article | 24 August 2001 Paper

Photolithographic evaluation of deep UV resist materials for mask-making applications

Warren Montgomery, Alex Buxbaum, William Rodrigues, Jeff Albelo, Scott Fuller

Proceedings Volume 4345, (2001) https://doi.org/10.1117/12.436813

KEYWORDS: Etching, Photomasks, Photoresist processing, Deep ultraviolet, Critical dimension metrology, Manufacturing, Coating, Lithography, Semiconducting wafers, Chemistry

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