Dr. Wongi Park Profile

Dr. Wongi Park

at SAMSUNG Electronics Co., Ltd.

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Publications (1)

Proceedings Article | 28 April 2023 Presentation + Paper

Chemical approach to make the most of EUVL: stochastic effect mitigation with developer and rinse

Hyungju Ryu, Dokyeong Kwon, Jiho Song, Wongi Park, Jinseong Gwak, Haram Ko, Jiyoung Lee, Jinpyoung Kim, Kyungseok Ryu, Sungjo Hwang, Taemin Jeong, Heeyoung Go, Yigwon Kim, Kyoungyong Cho, Sangjin Kim, Changmin Park

Proceedings Volume 12494, 1249404 (2023) https://doi.org/10.1117/12.2656415

KEYWORDS: Extreme ultraviolet, Stochastic processes, Extreme ultraviolet lithography, Lithography, Optical lithography, Photoresist processing, EUV optics, Chemical composition, Semiconductors

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